Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 62

Advanced Energy ®
A good ground connection is essential to achieve the best possible RF connection
between the match network and the ground of the load. The V
network chassis must be intimately grounded to the plasma chamber
The ground lead must provide a low impedance RF path. ff a proper RF ground is not
achieved, the RF current flowing through the ground leads will cause ground
bouncing. The RF current flowing through a poor ground connection will result into a
voltage across that ground lead. In this situation, the load and the match network will
have a different voltage potential and the ground can no longer be regarded as a good
and common ground, which can result in the following:
• RF radiation
• Malfunction of match controllers or other devices
• Electrical shock from the V arioMatch match network cabinet
To Properly Ground the VarioMatch Match Network:
Mount the unit as described in
page 5-6. RF grounding is achieved via mounting the unit to the mounting plate.
Note: Use the
the VarioMatch match network as described.
MOUNTING THE VARIOMATCH MATCH NETWORK
Note: VM 69000082: see your company's internal documentation for mounting
instructions.
Use these instructions for mounting the V arioMatch match network to a mounting
plate attached to the load. The mounting plate acts as ground for the V arioMatch
match network.
There is no need to open the VarioMatch match network cover. You can secure the
unit to the mounting plate using the four M6 mounting threads on the bottom panel.
For the location of the screw holes, see
5-6
GROUND
"Mounting the VarioMatch Match Network" on
connectors on the rear of the unit only if you cannot mount
"Unit Dimensions" on page
Installation, Setup, and Operation
arioMatch match
3-1.
57020080-00D