Tools Required To Change The Interconnection; Disconnecting Power And Rf, And Removing The Cover - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Advanced Energy ®
•
"Changing the Interconnector" on page 5-29
•
"Changing the Jumpers" on page 5-32
•
"Reattaching the Top Cover and Reconnecting Power and R
•
Also see
using a CESAR generator to control the V arioMatch match network

TOOLS REQUIRED TO CHANGE THE INTERCONNECTION

AE supplies the following equipment:
•
Interconnector
• Bridge, to hold the water tubing in place once you remove the original
interconnector
You will need to supply the following additional equipment:
• 7 mm wrench
• 12 mm wrench
• 14 mm wrench
DISCONNECTING POWER AND RF, AND REMOVING THE
COVER
To Disconnect Power and RF and to Remove the Cover:
1. Turn off RF from the generator.
2. Disconnect AC MAINS.
3. Disconnect RF in
4. Disconnect RF
5. Remove the top cover, being careful to not damage the plug leading to the fan:
a. Remove the large top cover (with the fan) from the V arioMatch match network
by unscrewing the twelve screws on the cover. Leave the small top and side
covers in place.
b. Disconnect the
5-28
"Interaction With a Cesar Generator" on page 5-16
(RF-GENERATOR).
out (PLASMA/LOAD).
plug leading from top lid to the fan.
Install ation, Setup, and Operation
F
' on page 5-35
for information on
57020080-00D