Set Up The Match For Your Load; Interaction With A Cesar Generator; Network - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Advanced Energy ®

Interaction With a Cesar Generator

You can control the V arioMatch match network in either manual mode or automatic
mode using a Cesar generator. When the V arioMatch
Cesar generator via the
match network using either of the following two methods:
• Front Panel Display
The front panel display on the CESAR generator will show the position of the
capacitors, the mode (automatic or manual), the measured DC bias, and whether
the match network is active or not. It also allows you to change the mode
(automatic or manual) via buttons and to move the capacitors manually. The
information of the match network is shown on the Cesar front panel as soon as
the Cesar generator detects a connection to the match
• Host Port
You can use the Cesar generator

network.

See the Cesar generator user manual for additional information.
Importance of Igniting Plasma
A matching optimization can be done only when the load is consuming energy,
meaning that there exists a resistive part to which all the energy is transferred. Purely
reactive components do not dissipate any energy.
When the load is
ignites, it is then possible to optimize the components in the match network for the
best tuning.
If, while experimenting with the match, the plasma does not ignite, the match
components cannot be optimized because there is no load in which to dissipate the RF
energy.
SET U P THE MATCH FOR YOUR LOAD
See Chapter 7, "V arioMatch Match Network Tuning Ranges"
for your V arioMatch match network.
5-16
MATCHING
Host Port
interface, you can control the VarioMatch
plasma, this means you need to ignite the plasma. After the plasma
Installation, Setup, and Operation
INTERFACE.
match network is connected to a
to control the V arioMatch match
to check the tune range
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