Figure 5-11. Tapping Of The Tune Coil For High Capacitive Load - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Advanced Energy ®

Figure 5-11. Tapping of the tune coil for high capacitive load

9. Reattach the top cover:
a. Plug in the fan
b. Attach the top cover using the twelve screws you removed in step 2.
10. Reconnect
described in
Selecting the Correct Tap Setting for the Load Coil
See "Physical Specifications Table" on page 3-7
specifications.
The other device in the match network that affects the range of the match capability is
the load capacitor. Depending upon the load resistance (the real part of the load
impedance) this load capacitor needs to be more or less capacitive. A small tapped coil
at the input of the V arioMatch match network enables the effective value of the load
capacitor to be increased to
5-22
Tune coil, tap position for high capacitive load
PLASMA/LOAD, RF-GENERATOR, and AC MAINS as
"Installing the VarioMatch Match Network" on page
several times its actual value.
Installation, Setup, and Operation
PLASMA/LOAD
5-4.
for your unit's internal coil
57020080-00D