Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 8

Advanced Energy ®
Chapter 4. Communication Interfaces and Controls
15-Pin VarioMatch Match Interface .................................... 4-1
INTERFACE Connector ......................................... 4-1
Match Interface Cabling Requirements ............................. 4-2
Pin Descriptions ............................................... 4-2
Wiring Diagrams ............................................... 4-4
Match INTERFACE Using Switches ................................ 4-7
Chapter 5. Installation, Setup, and Operation
Preparing to Install the VarioMatch Match Network ........................ 5-1
Spacing Requirements .......................................... 5-1
Installation Requirements ........................................ 5-1
Cooling Requirements ....................................... 5-2
Tools Required for Installation .................................... 5-2
Unpacking .................................................... 5-2
Cable Requirements ............................................ 5-3
General Cabling Considerations for PLASMA/LOAD ............... 5-3
Shielding the RF Connections ................................. 5-4
Installing the VarioMatch Match Network ............................... 5-4
Mounting the Unit .............................................. 5-5
General Mounting Instructions ................................. 5-5
Grounding the Unit .......................................... 5-5
Mounting the VarioMatch Match Network ........................ 5 - 6
Connecting the Match INTERFACE (Optional) ........................ 5-7
Connecting the Cooling Water .................................... 5-7
Connecting RF Input From a Generator ............................. 5-8
Connecting to the Load .......................................... 5-9
Connecting the VarioMatch Match Network to the Load ............ 5-11
Connecting AC Input (Mains) Power .............................. 5-11
First-Time Operation .............................................. 5-12
Normal Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ......... 5-14
Automatic Tune Mode .......................................... 5-14
Manual Tune Mode ............................................ 5-15
Interaction With a Cesar Generator ............................... 5-16
Importance of Igniting Plasma ................................... 5-16
Set Up the Match for Your Load ..................................... 5-16
Selecting the Correct Tap Setting for the Tune Coil ................... 5-18
Setting Tune Coil Taps ..................................... 5-18
Selecting the Correct Tap Setting for the Load Coil ................... 5-22
Changing the Configuration Between the L match and the Gamma Topology ...
5-27
Tools Required to Change the Interconnection ................... 5-28
Disconnecting Power and RF, and Removing the Cover ........... 5-28
Changing the lnterconnector ................................. 5-29
Changing the Jumpers ...................................... 5-32
viii
Contents
Tab le of
57020080-00D