Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 173

RF IN
RF IN
ICP
Schematics
Figure 7-70.
Figure 7-71.
57020080-00D
AE VarioMatch
C selies
Cslnmt
/GP coil and inductor schematic, Gamma
Liu
C seiies
(wi r e)
Csbunt
/GP coil and inductor schematic, L match
VarioMatch Match Network Tuning Ranges
RF OUT
RF OUT
Match Network, VM 1000/1500 Platform
TM
7-71