Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 15

Figure 7-49. 4 MHz; Tune coil, 25 turns: tap 4; Load
Figure 7-50. 4 MHz; Tune coil, 25 turns: tap 5; Load
Figure 7-51. 4 MHz; Tune coil, 25 turns: tap 6; Load
Figure 7-52. 4 MHz; Tune coil, 25 turns: tap 1; Load
Figure 7-53. 4 MHz; Tune coil, 25 turns: tap 2; Load
Figure 7-54. 4 MHz; Tune coil, 25 turns: tap 3; Load
Figure 7-55. 4 MHz; Tune coil, 25 turns: tap 4; Load
Figure 7-56. 4 MHz; Tune coil, 25 turns: tap 5; Load
Figure 7-57. 4 MHz; Tune coil, 25 turns: tap 6; Load
Figure 7-58. 4 MHz; Tune coil, 25 turns: tap 1; Load
Figure 7-59. 4 MHz; Tune coil, 25 turns: tap 2; Load
Figure 7-60. 4 MHz; Tune coil, 25 turns: tap 3; Load
Figure 7-61. 4 MHz; Tune coil, 25 turns: tap 4; Load
Figure 7-62. 4 MHz; Tune coil, 25 turns: tap 5; Load
Figure 7-63. 4 MHz; Tune coil, 25 turns: tap 6; Load
Figure 7-64. 4 MHz; Tune coil, 25 turns: tap 1; Load
Figure 7-65. 4 MHz; Tune coil, 25 turns: tap 2; Load
Figure 7-66. 4 MHz; Tune coil, 25 turns: tap 3; Load
Figure 7-67. 4 MHz; Tune coil, 25 turns: tap 4; Load
Figure 7-68. 4 MHz; Tune coil, 25 turns: tap 5; Load
Figure 7-69. 4 MHz; Tune coil, 25 turns: tap 6; Load
Figure 7-70. ICP coil and inductor schematic, Gamma ........................ 7-71
Figure 7-71. ICP coil and inductor schematic, L match ........................ 7-71
Figure 7-72. VM 1500, Gamma .......................................... 7-72
Figure 7-73. VM 1500, L match .......................................... 7-73
Figure 7-74. VM 4015, Gamma .......................................... 7-74
Figure 7-75. Delta match coil and inductor schematic ........................ 7-75
Figure 7-76. Tune coil, 2. 5 turns ......................................... 7-76
Figure 7-77. VM 700 coil and inductor schematic ............................ 7-77
Figure 7-78. Tune coil, 1 0
Figure 7-79. Tune coil, 10
Figure 7-80. Tune coil, 1 0
Figure 7-81. Tune coil, 1 0
Figure 7-82. Tune coil, 1 0
Figure 7-83. Tune coil, 1 0
Figure 7-84. Tune coil, 1 0
Figure 7-85. Tune coil, 1 0
Figure 7-86. Tune coil, 1 0
Figure 7-87. Tune coil, 1 0 turns: tap 1 O; Load coil, 3 turns: tap A ............... 7-87
57020080-00D
AE VarioMatch
TM
turns: tap 1; Load coil, 3 turns: tap A ................ 7-78
turns: tap 2; Load coil, 3 turns: tap A ................ 7-79
turns: tap 3; Load coil, 3 turns: tap A ................ 7-80
tap 4; Load coil, 3 turns: tap A ................ 7-81
turns:
tap 5; Load coil, 3 turns: tap A ................ 7-82
turns:
turns: tap 6; Load coil, 3 turns: tap A ................ 7-83
turns: tap 7; Load coil, 3 turns: tap A ................ 7-84
turns: tap 8; Load coil, 3 turns: tap A ................ 7-85
turns: tap 9; Load coil, 3 turns: tap A ................ 7-86
Match Network, VM 1000/1500 Platform
4 turns: tap B .......... 7-50
coil,
coil, 4 turns: tap B .......... 7-51
coil, 4 turns: tap B .......... 7-52
coil, 4 turns: tap C .......... 7-53
coil, 4 turns: tap C .......... 7-54
coil, 4 turns: tap C .......... 7-55
coil, 4 turns: tap C .......... 7-56
coil, 4 turns: tap C .......... 7-57
coil, 4 turns: tap C .......... 7-58
coil, 4 turns: tap D .......... 7-59
coil, 4 turns: tap D .......... 7-60
coil, 4 turns: tap D .......... 7-61
coil, 4 turns: tap D .......... 7-62
coil, 4 turns: tap D .......... 7-63
coil, 4 turns: tap D .......... 7-64
coil, 4 turns: tap E .......... 7-65
coil, 4 turns: tap E .......... 7-66
coil, 4 turns: tap E .......... 7-67
coil, 4 turns: tap E .......... 7-68
coil, 4 turns: tap E .......... 7-69
coil, 4 turns: tap E .......... 7-70
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