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Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 76

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Advanced Energy
®
8. Using the wrench, screw the tap to the selected tum on the coil.
Tune
coil,
tap position for
small
capacitive load
PLASMNLOAD
Tapping of the tune coil for small capacitive load
Figure 5-9.
5-20
Installation,
Setup, and Operation
57020080-00D

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