Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 192

Advanced Energy ®
G
Gamma topology 2-6
general description 2-1
ground 4-2, 5-5
guidelines
safety 1-2
SEMI 1-5
icons
in user
manu al 1-1
on unit 1-2
industry guidelines, compliance
input connector, see RF input connector
nput im pedance to generator 3-11, 3-12, 3-14
!
_
installation
how to 5-4
requirements 5-1
safety guidelines 1-2
tools required 5-2
INTERFACE
15-pin match 4-1
automatic mode 4-1
cabling requirements 4-2
connecting 5-7
connector 3-7, 4-1
grounding 4-2
interacting with CESAR generator 5-15
pin descriptions 4-2
using switches 4-7
interlock 1-6
see also limits
L
L match network 2-5
labels on unit 1-2
limits 1-6
load
coil and capacitor in L match network 2-5
coil specifications 3-1 O
coil, theory 2-5
definition 2-1
igniting plasma 5-16
load capacitor 2-4
load coil 2-4
load coil tap settings 5-22
set up the match 5-16
load checks
troubleshooting 6-3
ii
M
MAINS
see also AC input
connector 3-8, 5-12
manual
marking,
maximum load DC selfb ias voltage 3-11, 3-12,
3-13, 3-14
maximum reactive power 3-11, 3-12, 3-14
maximum RF load current 3-11, 3-12, 3-14
maximum RF load voltage 3-11, 3-12, 3-14
maximum transfer power 3-11, 3-12, 3-13
modes,
with 1-5
mounting 3-7, 5-5, 5-6
N
normal operation 5-14
0
operation
automatic tuning mode 2-2, 5-14
first time 5-12
manual
normal operation 5-14
safety guidelines 1-2
theory of operation 2-3
overvoltage category specifications 3-17
p
physical
pin descriptions
AC input connector 5-12
match INTERFACE 4-2
plasma, see load
PLASMA/LOAD
connector 3-8, 5-2, 5-9
connector and strap 5-2
pollution degree specifications 3-17
product
certification 1-3
compliance 1-3
R
returns
authorized 6-5
RF input connector
connecting from generator 5-8
from generator 5-8
pin descriptions 5-9
specifications 3-7
Index
tuning mode 5-15
CE 1-3
see tuning modes
tuning mode 2-2, 5-15
specifications 3-1, 3-7
57020080-00D