Connecting The Match Interface (Optional); Connecting The Cooling Water; Figure 5-1. Installing The Variomatch Match Network To A Mounting Plate - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

PLASMA/LOAD
fil CAUTION:
When selecting the mounting hardware, choose screws that will not extend into the
unit cabinet more than 10 mm. Brass fasteners are recommended .

Figure 5-1. Installing the VarioMatch match network to a mounting plate

To Mount the VarioMatch Match Network:
1. Ensure AC
disconnected.
2. If the
an opening in the mounting plate that lines up with the connector.
3. Attach the V arioMatch match network cabinet to the mounting plate with four M6
screws.
Connecting the Match I NTERFACE (Optional)
The 15-pin female subminiature-D connector on the front panel lets you
VarioMatch match network to an external remote controller (like the AE RMC-1 or a
homemade controller) or to an AE RF generator.
To Connect the Match INTERFACE:
Connect the cable between the controlling device and the
on the VarioMatch match network. For specific information on the interface
connection, including pin descriptions and communication protocols, see
"Communication Interfaces and

Connecting the Cooling Water

Do not use de-ionized water for cooling purposes. De-ionized water
causes both corrosion and erosion of cooling manifolds.
57020080-00D
MAINS, PLASMA/LOAD,
AE VarioMatch
TM
Mounting plate {acts as ground)
connector is on the bottom of the
Controls".
Installation, Setup, and Operation
RF-GENERA TOR
INTERFACE
Match Network, VM 1000/1500 Platform
•
.
.
and are all
unit, ensure you have
connect the
connection
Chapter 4,
5-7