Table Of Contents - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Chapter 1. Safety and Product Compliance Guidelines
Important Safety Information ......................................... 1-1
Danger, Warning, and Caution Boxes in the Manual ....................... 1-1
Safety Guidelines .................................................. 1-2
Rules for Safe Installation and Operation ............................ 1-2
Interpreting Product Labels ....................................... 1-2
Product Compliance ................................................ 1-3
Product Certification ............................................ 1-3
Safety and Compliance Directives and Standards ..................... 1-4
Electromagnetic Compatibility (EMC) Directives and Standards ....... 1-4
Safety Directives and Standards ............................... 1-4
Industry Guidelines ......................................... 1-5
Conditions of Use .............................................. 1-5
Interlocks and Limits ............................................... 1-6
Chapter 2. Product Overview and Theory
Product Description ................................................ 2-1
Operating Modes .................................................. 2-2
Theory of Operation ................................................ 2-3
Topologies ....................................................... 2-4
L Match Topology .............................................. 2-5
Gamma Topology .............................................. 2-6
Chapter 3. Specifications
Physical Specifications ............................................. 3-1
Unit Dimensions ............................................... 3-1
Spacing Requirements .......................................... 3 - 5
Front Panel Connections ..................................... 3-6
PLASMA/LOAD Connection .................................. 3-6
Cooling ................................................... 3-6
Physical Specifications Table ..................................... 3-7
Electrical Specifications ............................................ 3 - 1 O
VM 300 Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .... 3-11
VM 700 Series ............................................... 3-11
VM 1000 Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .... 3-12
VM 1500 Series .............................................. 3-13
Cooling Specifications ............................................. 3-14
Environmental Specifications ........................................ 3-17
57020080-00D
AE VarioMatch Match Network, VM 1000/1500 Platform
TM

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