Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 26

Advanced Energy ®
Table 2-1. Theory of operation description
Section
Motor Control
DC Bias
Load and Tune
TOPOLOGIES
The V arioMatch match network uses one of the following topologies:
• L match topology (some ICP units and most non-ICP units)
• Gamma topology (most ICP units and some non-ICP units)
If you purchased an ICP
your unit.
2-4
The Motor Control section generates the signals needed to drive the
capacitor motors using the phase and magnitude signals, and
provides for the manual control interface. The motors are DC motors
and use potentiometers to provide feedback as to the capacitor
positions. To keep the capacitors and the feedback potentiometers
from reaching their mechanical limits, the motors automatically
reverse directions before the mechanical limits are reached.
DC Bias voltage feedback is provided by the DC bias PCB and the
motor driver control board. The DC bias board provides the voltage
divider, whereas the motor driver board buffers and rectifies the DC
bias voltage so that the DC bias voltage at the interface port is always
positive.
The V arioMatch match network uses either the L match topology or
Gamma topology (see "Topologies" on page
The tuning elements may consist of:
• Variable load capacitor
• Variable tune capacitor
• Load coil
• Tune coil
Tapped or replacable coils are used to produce the impedance range
desired.
unit, see Chapter 3, "Specifications"
Product Overview and Theory
Description
2-4).
to see the topology for
57020080-00D