Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 193

RF input, cabling specifications 5-2
RF, shiel ding 5-4
runtime from startpoint to endpoint 3-11, 3-12,
3-13, 3-14
s
safety
conditions of use 1-5
directives and standards 1-4
guidelines 1-2
rules for installation 1-2
rules for operation 1-2
SEMI guidelines, compliance
size 3-7
spacing requirements 3-5, 5-1
specifications
AC input line current 3-11, 3-12, 3-13
AC input line frequency 3-11, 3-12, 3-13
AC input line voltage 3-11, 3-12, 3-13
AC input power connector 3-8
air flow 3-16
clearance 3-7
climatic 3-17
coil 3-8
connector and cable 3-7
coolant connectors 3-8
cooling 3-14
DC selfbias monitor voltage 3-12, 3-13,
3-14
electrical 3-10
environmental 3-15, 3-17
frequency 3-11, 3-12, 3-13
input impedance to generator 3-11, 3-12,
3-14
load coil 3-10
maximum load DC selfbias voltage 3-11,
3-12, 3-13, 3-14
maximum reactive power 3-11, 3-12, 3-14
maximum RF load current 3-11, 3-12, 3-14
maximum RF load voltage 3-11, 3-12, 3-14
maximum transfer power 3-11, 3-12, 3-13
mounting 3-7
overvoltage category 3-17
3-1, 3-7
physical
PLASMA/LOAD connector 3-8
pollution degree 3-17
RF input connector 3-7
runtime 3-11, 3-12, 3-13, 3-14
size 3-7
spacing requirements 3-5
tune coil 3-9
57020080-00D
AE VarioMatch
TM
tuning range 3-11, 3-12, 3-13, 3-14
water contaminates 3-16
water flow 3-15
water pressure 3-15
water temperature 3-15
weight 3-7
standards 1-4
symbols
in user
on unit 1-2
T
with 1-5 theory of operation 2-3
topology 2-4, 2-5, 2-6, 3-10
troubleshooting
checklists 6-2
checks
checks
contacting customer support 6-4
overview 6-1
system level 6-2
unit output 6-3
troubleshooting procedures
external load checks 6-3
open/short RF output path 6-3
tune
coil
coil
coil,
tune capacitor 2-4
tune
tune
tuning elements 2-4
tuning modes
automatic 5-14
automatic mode
automatic mode for first-time operation
controlling with match INTERFACE 4-1
manual
manual mode
tuning range 3-11, 3-12, 3-13, 3-14
u
unit
icons and symbols used 1-2
unit output
troubleshooting 6-3
unpacking 5-2
user manual
symbols and icons used 1-1
Index
Match Network, VM 1000/1500 Platform
manual 1-1
with power off 6-2
with power on 6-2
and capacitor in L match network 2-5
specifications 3-9
theory 2-5
coil 2-4
coil tap setting 5-18
5-13
5-15
iii