Cooling Specifications - Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

Advanced Energy ®
Electrical specifications for VM 1500 series (Continued )
Table 3-5.
Description
Maximum reactive power
Maximum RF load current
Maximum RF load voltage
Input impedance to generator
Maximum load DC self bias
voltage
DC selfbias monitor voltage
Runtime from start point to end
point
Tuning range
COOLING S PECIFICATIONS
Table 3-6
lists the cooling specifications for the match network.
the environmental and climatic specifications.
3- 14
Specification
Varies by V arioMatch product part number:
PN 69000070, 69000226: 80,000 W
PN 69000062: 100,000 W
PN 69000001, 69000024, 69000025, 69000229,
69001207, 69001214, 69002207, 69002208: 140,000 W
PN 69000007, 69000041: 220,000 W
Varies by V arioMatch product part number:
PN 69000070, 69000226: 20 A
PN 69000062: 25 A
PN 69000001, 69000024, 69000025, 69000229,
69001207, 69001214, 69002207, 69002208: 35 A
PN 69000007, 69000041: 55 A
4000 V p eak
so n
0 VDC to 4000 VDC
0 V to lO V
3 seconds
To reach appropriate resistance and reactance values,
you may need to change load and series coil
See "Set Up the Match for Your Load" on page
For details on tuning ranges possible for your unit, see
Chapter 7, "VarioMatch Match Network Tuning
Ranges".
Specifications
settings.
5-16.
describes
Table 3-7
57020080-00D