Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual page 51

Table 4-1. VarioMatch match INTERFACE connector pin description
Pin Return Name
Pin
6 GND GROUND
NIA
7
8 1 or 9 M ANUAL
MODE
9 GND GROUND
10 1 or 9 +5VSUPPLY
1 or 9 +15V
1 1
SUPPLY
1 2 6 DC-
SELFBIAS
MONITOR
13 6
Cnme
POSITION
MONITOR
57020080-00D
AE VarioMatch
TM
Signal
Type
Gnd Reference ground for DC Bias and capacitor
position signals.
Reserved
Input Connect
V arioMatch match network into manual mode.
Gnd Ground connect to the cable shield.
Output +5 Volts DC from internal DC supply.
For external use. Maximum current draw
l00 mA.
Output +15 V DC from internal DC supply.
For external use. Maximum current draw
lO0 mA.
Output DC self bias test voltage.
Provides a test voltage to monitor the DC self
bias of the plasma electrode in the vacuum
chamber. The output voltage is scaled down
400:1 (400 V of DC bias results in 1 V output).
The instrument used to measure the bias voltage
should have an
l 0 kQ.
Output Series (tune) capacitor position signal.
The voltage at this output is directly
proportional to the position of the capacitor
C nme· The minimum voltage is approximately
0.3 V representing the minimum capacity of
Cnme - The maximum voltage is approximately
9.7 V representing the maximum capacity of
Grune·
Communication Interfaces and Controls
Match Network, VM 1000/1500 Platform
Description
this + 15 V input to ground to set the
input impedance of at least
4-3