Operation; Before Starting - EBARA ESA300W Instruction Manual

7. Operation

7.1 Before Starting

(1) Turn on the cooling water supply and check that there are no leaks at the
pipe connections.
Without sufficient cooling water, the pump temperature will rise and problems
CAUTION
such as rotor contact will occur.
[NOTE] The pump unit itself has no cooling water flow adjustment valve.
(2) Turn on the N2 gas supply.
Check that the regulator attached to the pump is closed. (It is closed when
the pressure adjustment knob is fully turned in the counterclockwise
direction.) Open the main valve and check that there are no N2 gas leaks
from the pipe connections.
Slowly turn the pressure adjustment knob clockwise to set the pressure
(gauge pressure) to 0.1 MPa first. Then press the red stopper to lock the
knob in position.
Unless a sufficient supply of N2 gas is maintained, serious problems will occur
WARNING
such as oil back flow or pump corrosion and accretion of reaction by-products.
Be sure to purge with N2 gas in order to prevent corrosion and reduce the
WARNING
formation/deposition of reaction by-products in the pump. When inflammable
and/or toxic gases are diluted with N2 to the safe concentration, be sure to
maintain a separate supply of N2 gas to the pump exhaust pipe.
Abrupt rotation of the pressure adjustment knob will cause the pressure indicator
CAUTION
needle of the regulator to wobble and result in an inaccurate pressure display.
(3) Turn on the power supply to the pump.
(4) The LCD controller counts down 10 seconds after placing the Earth Leakage
Breaker (ELB) into the ON position.
(50)
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