Filament Replacement - Hitachi TM3000 Instruction Manual

5.1 Filament Replacement

If an image does not appear when an application button is pressed or a filament-related error
message appears, a blown filament must be suspected. Any blown filament, which provides
a light source that permits observation, must be replaced.
1. Close the application. Turn off the power switch located on the right side of the main unit.
Wait for a minimum of 30 minutes, and then open the top cover.
2. As shown in Figure 5.1-1, holding onto the lower part of the top cover with your finger
tips, gently lift it.
Figure 5.1-1 Opening and Closing the Top Cover (1)
CAUTION : If the system was in use until immediately before the cover was opened,
the Wehnelt and the anode around the filament could still be hot. To
avoid burns from touching it, perform filament replacement work by
allowing a minimum of 30 minutes after the power switch was turned off.
WARNING: A maximum of AC 240 V, DC 15 kV prevails in the interior of the system.
Opening the cover for the main unit and touching the interior parts or
circuits when the system is still powered on can cause severe injury or
death from electric shock.
Do not remove the cover from the system. If the electron gun must be
opened for maintenance, be sure to turn off the leak breaker and the
power switch, and unplug the power cord before commencing work.
CAUTION : When opening or closing the cover, use caution not to get your fingers
caught to avoid injury.
3. Introduce air into the specimen chamber.
Turn on the power switch, and press the [EVAC/AIR] button to introduce air into the
specimen chamber.
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