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Chapter 4 Angular Measurements
Mounting and Aligning the Optics on the Target Machine
8
Mount the interferometer or reflector on the spindle as shown in
Figure 4-10.
A
Mounting for Z-axis
pitch and yaw, or
X-axis and Y-axis
yaw
B
Mounting for X-axis
and Y-axis pitch
************************
1
Post and height
adjuster
2
Angular
interferometer or
reflector
Figure 4-10. Interferometer spindle mounting
Although posts, bases, and height adjusters provide considerable
adaptability for mounting optics, there may be some situations when you
need added flexibility. Figure 4-11 shows how you can increase
adaptability by using additional hardware.
9
Gently tap each optic with your finger to ensure its mounting is rigid and
free of vibration.
If you feel any vibration, tighten all connections in the mounting.
4-14
1
2
A
1
2
B
Measurements Reference Guide
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