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Chapter 11 Diagonal Measurements
Assembling the Interferometer, Reference Retroreflector and Beam
Steering Arm
Assembling the Interferometer, Reference
Retroreflector and Beam Steering Arm
1
Determine the setup you want to use for your measurement. Refer to
Table 11-1 and Figures 11-5 through 11-7, or to notes about previous
setups, to determine the interferometer and reference retroreflector
assembly arrangement you want to use. Different combinations provide
different angle range capabilities. The measurement shown in Figure 11-4
is "far low to near high," on a stacked-stage, vertical-spindle machine,
with the laser head at the right. (The symbol glossary at the end of this
chapter describes the symbols used here and in other places in this
chapter to indicate general configurations or interferometer
configurations.)
2
Assemble the interferometer and reference retroreflector.
In addition to the figures referenced above, you can refer to Figure 11-21
for help. Be sure the retroreflector is tightly fastened to the
interferometer.
3
Attach the interferometer assembly you created in step 2 to the beam
steering arm, keeping in mind the configuration you want for your
measurement. See Figures 11-5 through 11-7.
4
Set this assembly in a safe place while you assemble other pieces of the
diagonal measurement hardware.
11-12
Measurements Reference Guide
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