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Chapter 11 Diagonal Measurements
Installing and Aligning the Optics on the Machine
Installing the measurement optics on the machine
This procedure is for a stacked-stage milling machine; that is, one whose
table can move in X and Y. Adapt the procedure as necessary when you
want to use some other setup.
This procedure assumes that you have performed the assembly
procedures earlier in this guide.
This procedure has these major steps:
1
Mounting the interferometer assembly on the machine table.
2
Installing the measurement retroreflector.
Mounting the interferometer assembly on the machine table
To mount the interferometer assembly on the machine, follow these steps:
1
Turn on the PC and start the Agilent 5530 software running.
2
On the Main Menu, select Other Meas.
The Other Measurements screen (Figure 11-10) is displayed.
11-22
Measurements Reference Guide
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