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Chapter 11 Diagonal Measurements
Installing and Aligning the Optics on the Machine
You can slightly reduce the sensitivity of the measurement retroreflector
to rotational motions of the spindle by placing the retroreflector's nodal
point on the spindle's axis. In either retroreflector described here, the
nodal point is about 12.6 mm (0.5 inch) behind the front surface of the
glass. (See Figure 11-9.)
Installing and initially aligning the laser head
Use this procedure to install the laser head on the tripod and perform the
initial alignment of the laser beam to the XY plane face diagonal of the
measurement and parallel to the XY plane (table) of the machine. This
alignment is important during measurement as the table carrying the
interferometer moves.
Place the tripod at the desired point for your measurement. The vertical
center line of the tripod should be in or near the vertical plane containing
the body diagonal you will be measuring. For this autoreflection
alignment procedure, the longer the distance from the laser head to the
interferometer, the more accurate the alignment can be; the ideal distance
is from 1 to 4 meters (3 to 12 feet).
Set the laser head on the tripod and secure it. Refer to the Agilent 5530
Getting Started Guide for details.
Connect the laser to its power source and turn it on.
Select the laser head's small output (upper) aperture, and the lower
(return port) target, for alignment.
Adjust the laser head's and tripod's vertical and horizontal translation
and pitch and yaw controls so the laser beam autoreflects from the beam
steering mirror back to the laser head's output (upper) port.
Never stare directly into the laser beam or any bright reflection of it.
Failure to observe this warning may result in personal injury.
11-26
Measurements Reference Guide
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