Agilent Technologies 5530 Reference Manual page 330

Dynamic calibrator
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NOTE
Chapter 11 Diagonal Measurements
Aligning for the Second Diagonal in the Same Plane
If your data was for the second diagonal in the first plane, you will have to
move the laser head and begin the alignment procedure for the second
plane. Go back to "Installing the measurement optics on the machine"
text. Note that you must not change the measurement setup values from
those of the previous measurements you have made for this diagonal
analysis.
If your data was for the fourth diagonal to be used in your analysis, go to
"Analyzing your data" below.
Aligning for the Second Diagonal in the Same
Plane
Alignment to the "far low to near high" diagonal in this plane is similar to
the procedure above for the first diagonal ("near low to far high").
Do not move the laser head. The beam is already aligned for the second
diagonal.
The difference is:
The interferometer assembly is moved to the position on the table
where it intersects the second diagonal; that is, the opposite end of the
diagonal plane of the work zone being calibrated.
The interferometer and beam steering mirror angles must be reset as
required for the new measurement. Again, you can use the adjustable
triangle to provide a more accurate initial setup. Refer to Figures 11-5
through 11-7 to determine what might be the best setup for your
second-diagonal measurement.
The measurement retroreflector must be reoriented, to return the
measurement beam to the interferometer in its new location.
11-34
Measurements Reference Guide

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