Agilent Technologies 5530 Reference Manual page 325

Dynamic calibrator
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NOTE
NOTE
Chapter 11 Diagonal Measurements
Installing and Aligning the Optics on the Machine
Aligning the beam to the elevation angle (β) of the
measurement
This procedure assumes that you have performed the assembly,
installation, and alignment procedures above. This means that the laser
head has already been aligned to the XY diagonal (azimuth) path of your
measurement, and you should only need to adjust the beam steering
mirror to direct the beam toward the measurement retroreflector moving
along the measurement diagonal.
It is likely that, no matter how precise you have tried to be in your setup,
you will have to make some alignment adjustments. Here, previous
experience performing distance (linear) alignments can be a help as you
align the optics.
Move the machine spindle and table to place the measurement
retroreflector close to the output face of the interferometer.
Adjust the measurement retroreflector so its face is parallel to and
centered on the interferometer's measurement face (the one facing along
the measurement path).
At this time, the measurement retroreflector should be providing a return
beam to the front of the laser head. If the return beams from the two
retroreflectors overlap, you will see only one dot.
You may have to reposition the measurement retroreflector slightly in
order to overlap the measurement beam dot and reference beam dot on the
laser head's input port.
If you want to see only the dot from the measurement path return beam,
remove the reference retroreflector from the interferometer, being careful
not to disturb the interferometer alignment. Be sure to replace this
retroreflector before you try to make a measurement.
Another way to identify the measurement beam dot during alignment is to
use your hand to momentarily interrupt the measurement path beam.
Measurements Reference Guide
11-29

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