Agilent Technologies 5530 Reference Manual page 81

Dynamic calibrator
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A
Measurement along the
Y-axis
B
Measurement along the
X-axis
C
Measurement along the
Z-axis with the laser
beam bent vertically 90°
to the reflector
***********************
1
Angular reflector
mounted on a height
adjuster with a post and
base
2
Angular interferometer
mounted in a spindle
3
Laser beam
4
Laser head
5
Angular interferometer
mounted on a height
adjuster with a post and
base
6
Angular reflector
mounted in a spindle
Chapter 4 Angular Measurements
Mounting and Aligning the Optics on the Target Machine
A
B
6
C
5
Figure 4-4. Positioning optics for yaw measurements
Measurements Reference Guide
1
A
2
3
4
2
3
4
3
4
1
A
4-9

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