Agilent Technologies 5530 Reference Manual page 263

Dynamic calibrator
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Chapter 9 Flatness Measurements
Assembling and Mounting the Optics
You are now ready to position the straightedge and mount the optics.
Mounting the optics
To mount the optics, follow these steps:
1
Position the straightedge as shown in Figure 9-8 or 9-9.
Leave a gap of approximately 5 mm (3/16 inch) between the straightedge
and the measurement line. The gap leaves room to properly position and
move the optics along the measurement line.
2
Depending on whether or not you are using flatness mirrors, place the
optics on the surface plate using the following guidelines. Figures 9-8
and 9-9 show two possible setups.
The side of the foot spacer having two feet should be parallel to the
line being measured, and the line should pass under the centers of
those two feet.
If you are using flatness mirrors, the flatness mirror that first deflects
the laser beam is referred to later in the chapter as the "first flatness
mirror." For one way to set up the flatness mirror when the far corners
of the surface are inaccessible, see Figure 9-9.
3
Adjust the straightedge so that it is parallel to the measurement line at
both ends of the line and is flush with the edge of the foot spacer facing the
straightedge.
Remember that the foot spacer measurement line feet must be centered
over and resting on the measurement line, as described earlier.
Measurements Reference Guide
9-17

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