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NOTE
Appendix A Operating Specifications
Flatness and way straightness measurements use the angular optics. See
Table A-6 for angular specifications.
Table A-12. Flatness and way straightness measurement
Characteristic
51 mm (2 in) foot spacer
(Agilent 10759A) resolution per step
102 mm (4 in) foot spacer
(Agilent 10759A) resolution per step
152 mm (6 in) foot spacer
(Agilent 10759A) resolution per step
Surface plate reference plane
1
accuracy
Lateral offset and flatness range
Maximum accuracy
Measurement resolution
1
These specifications assume the temperature of all optical components is stabilized in the range 15° to 25° C
(59° to 77° F), and do not include effects of surface cleanliness.
Measurements Reference Guide
Specification
0.015 μm (0.5 μin)
0.03 μm (1.0 μin)
0.045 μm (1.5 μin)
The uncertainty of a surface plate flatness
measurement is bounded by two parallel
planes separated by the values below:
2
0.03 M
where M is the length of the
surface diagonal in meters;
2
0.12 F
where F is the length of the surface
diagonal in feet.
The combination of lateral offset and
maximum flatness deviation must not
displace the reflector more than ± 1.0 mm
from the beam path in any direction.
± 0.2 percent of displayed value
± 0.05 arcsec per meter of distance
travelled by the moving optic
A-11
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