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NOTE
NOTE
Appendix A Operating Specifications
Squareness measurements use the straightness optics. See tables A-7,
A-8, and A-9 for straightness specifications.
Table A-10. Squareness measurement specifications
Characteristic
Squareness measurement
accuracy for short-range
optics
Squareness measurement
accuracy for long-range
optics
1
Where θ is the calculated out-of-squareness angle in arcseconds.
2
Where M is the travel distance of the moving optic in meters.
3
Where F is the travel distance of the moving optic in feet.
Parallelism measurements use the straightness optics. See Tables A-7,
A-8, and A-9 for straightness specifications.
Table A-11. Parallelism measurement specifications
Characteristic
Parallelism measurement
accuracy for short range
optics
Parallelism measurement
accuracy for long range
optics
1
Where M is the travel distance of the moving optic in meters.
2
Where F is the travel distance of the moving optic in feet.
A-10
Specification
±(1.0 + 0.1 M) arcsec ±0.01 θ
measurements;
±(1.0 + 0.03 F) arcsecs ±0.01 θ
measurements
±(1.0 + 0.01 M) arcsec ±0.025 θ
measurements;
±(1.0 + 0.003 F) arcsecs ±0.025 θ
measurements
Specification
1
0.06 M arcsec
for metric measurements;
2
F/60 arcsec
for English measurements
1
0.006 M arcsec
for metric measurements;
2
F/600 arcsec
for English measurements
Measurements Reference Guide
1,2
for metric
1,3
for English
1,2
for metric
1,3
for English
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