Agilent Technologies 5530 Reference Manual page 283

Dynamic calibrator
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1
Laser head
2
Interferometer assembly
3
Reflector mounted on a
foot spacer
4
Nameplate
Figure 9-17. Positioning optics for measuring lines perpendicular to the laser head (lines 4, 6,
and 8) when using flatness mirrors
Chapter 9 Flatness Measurements
Completing the Set Up Flatness Screen
1
Measurements Reference Guide
3
2
4
9-37

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