Agilent Technologies 5530 Reference Manual page 129

Dynamic calibrator
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Chapter 4 Angular Measurements
Angular Position Measurements
*
Retroreflector as moving
optic
**
Interferometer as moving
optic
1
Laser head
2
Angular interferometer
2a
Laser beam(s) at
interferometer
3
Angular reflector
3a
Laser beam(s) at reflector
Figure 4-30A. Typical setups for vertical and horizontal table axes
(Part 1 of 2)
Measurements Reference Guide
*
STRAIGHT
**
STRAIGHT
1
2
OTHER
2a
1
2
2a
OTHER
3
3a
3
3a
4-57

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