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A
Measurement along the
X-axis
B
Measurement along the
Y-axis
C
Measurement along the
Z-axis with the laser
beam bent vertically 90°
to the optics
***********************
1
Angular reflector
mounted on a height
adjuster with a post and
base
2
Angular interferometer
mounted in a spindle
3
Laser beam
4
Laser head
5
Angular reflector
mounted in a spindle
6
Angular interferometer
mounted on a height
adjuster with a post and
base
Chapter 4 Angular Measurements
Mounting and Aligning the Optics on the Target Machine
1
A
4
B
4
C
Figure 4-3. Positioning optics for pitch measurements
4-8
3
4
2
1
2
3
5
3
6
Measurements Reference Guide
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