Agilent Technologies 5530 Reference Manual page 156

1
Spindle
2
Post
3
Attachment screws
4
Interferometer's base
plate
5
Interferometer
Figure 5-7. Assembling and mounting the interferometer without the height adjuster
Chapter 5 Straightness Measurements
Mounting and Aligning Optics for X-Axis or Y-Axis Measurements
1
2
3
4
5
5-12 Measurements Reference Guide