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8
1
Laser head
2
Straightedge
3
Interferometer assembly
4
First flatness mirror
5
Reflector mounted on a
foot spacer
Figure 9-15. Positioning optics for measuring diagonal lines (lines 1 and 2) when using
flatness mirrors
Chapter 9 Flatness Measurements
Completing the Set Up Flatness Screen
Repeat steps 1 through 8 in this section until you have measured all of the
measurement lines.
When the Analyze Data: Flatness window displays after you measure the
last line, continue with the steps in "Analyzing Flatness Measurement
Data."
1
Measurements Reference Guide
2
3
5
4
9-35
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