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1
Agilent 10766A Linear
Interferometer
2
Beam-steering arm
3
Beam steering mirror
4
Beam from laser head
5
Beam to interferometer
6
Angle between beams:
30° minimum,
120° maximum
See Table 11-1 for
explanation of symbols.
Chapter 11 Diagonal Measurements
Basics
1
2
4
6
Figure 11-22. Beam steering angle ranges
Measurements Reference Guide
3
5
6
4
3
1
2
5
11-45
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