Agilent Technologies 5530 Reference Manual page 269

Dynamic calibrator
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WARNING
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Chapter 9 Flatness Measurements
Aligning the Optics
DO NOT STARE DIRECTLY AT THE LASER LIGHT BEAM OR
THE BEAM REFLECTED FROM A POLISHED SURFACE. (IT IS
SAFE TO LOOK AT THE DOTS OF LIGHT REFLECTED ON AN
UNPOLISHED SURFACE.)
To align the optics, begin by following these steps:
Set the laser head's upper port to the small aperture by turning the upper
aperture control (Figure 2-13).
Rotate the target into position on the laser head's lower port by turning
the lower aperture control (Figure 2-13).
Set the laser head's turret ring to OTHER (Figure 2-13).
Attach a target to the interferometer on the side facing the laser beam
coming from the laser head so the target's cross hairs are below the
target's opening and the edges of the target line up as evenly as possible
with the edge of the interferometer.
If you are not using flatness mirrors, continue with the next section,
"Aligning the optics if you are not using flatness mirrors."
If you are using flatness mirrors, go directly to "Aligning the optics if you
are using flatness mirrors."
Aligning the optics if you are not using flatness
mirrors
To align the optics if you are not using flatness mirrors, follow these steps:
Adjust the laser head so the laser beam enters the hole of the target
mounted on the interferometer.
You can adjust the laser head by pitching, yawing, or translating it, or all
three.
Move the reflector so its foot spacer touches the interferometer assembly's
base.
Measurements Reference Guide
9-23

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