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Appendix A Operating Specifications
Table A-4. Linear and Diagonal measurement specifications
Characteristic
Linear optics resolution
(Agilent 10766A)
Plane mirror optics
1
resolution
2
(Agilent 10706A,B
High resolution plane mirror
4
optics resolution
2
(Agilent 10716A)
Measurement range
Measurement accuracy
1
For plane mirror optics, the maximum axis velocity is ±350 mm per second (±14 inches per second).
2
Requires the Agilent 10724A Plane Mirror Reflector. Since alignment of these optics is much more sensitive
than for linear optics, linear optics are recommended for general use.
3
Requires the Agilent 10704A retroreflector attached to the Agilent 10705A-C03. Also requires a measurement
retroreflector: either a second Agilent 10704A or an Agilent 10767A.
4
For high resolution plane mirror optics, the maximum axis velocity is ± 175 mm per second (± 7 inches per
second).
5
Vacuum accuracy is ± 0.02 ppm if the laser head is calibrated to MIL-STD 45662.
A-6
Specification
10 nm (0.4 μin) standard;
1 nm (0.04 μin) extended
5 nm (0.2 μin) standard;
0.5 nm (0.02 μin) extended
5 nm (0.2 μin) standard;
0.5 nm (0.02 μin) extended
Up to 40 m (130 ft) with linear optics;
Up to 80 m (260 ft) with long range option
Temperature: 0–40° C (32–104° F)
Using E1738A Air Sensor: ± 0.4 ppm
5
In vacuum
: ± 0.1 (± 0.02) ppm
Measurements Reference Guide
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