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A
Measurement in a horizontal
plane along the Z-axis
B
Measurement in a vertical
plane along the Z-axis
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1
Interferometer assembly
oriented horizontally in a
spindle
2
Interferometer assembly
oriented vertically in a
spindle
3
Reflector oriented vertically
4
Laser head
5
Reflector oriented
horizontally
Chapter 8 Parallelism Measurements
Positioning the Laser Head and Target Machine
A
B
Figure 8-4. Positioning of optics for coplanar parallelism measurements
8-8
4
4
Measurements Reference Guide
1
5
2
3
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