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Chapter 9 Flatness Measurements
Introduction
Introduction
This chapter explains how to make flatness measurements at multiple
points along measurement lines of a grid on a surface plate. You make
flatness measurements to check the flatness of a surface plate or similar
object. You would do this, for example, to ensure that the object meets
flatness specifications or requirements.
Before performing the procedures described in this chapter, you should
fully understand and know how to perform the procedures presented in
the Agilent 5530 Getting Started Guide.
Since you use the angular interferometer and reflector to make flatness
measurements, see angular measurement specifications for these optics in
Appendix A. See the flatness measurement specifications for flatness
specifications.
Figure 9-1 shows the required hardware for flatness measurements.
9-2
Measurements Reference Guide
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