Agilent Technologies 5530 Reference Manual page 159

Dynamic calibrator
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5
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Scribe line
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Interferometer's window
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Interferometer's bezel
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Chapter 5 Straightness Measurements
Mounting and Aligning Optics for X-Axis or Y-Axis Measurements
Lock the spindle in place, using, for example, a hose clamp and wedging
material. Then, remove the target from the interferometer.
Gently tap the interferometer assembly to ensure that its mounting is
rigid and free of vibration.
If you feel any vibration, tighten all connections in the mounting.
Set the laser head's upper port to the large aperture.
Rotate the interferometer's bezel (Figure 5-9) so the scribe line is
perpendicular to the reflector's slot.
Two beams should now be exiting the interferometer in a plane
perpendicular to the interferometer's slot. The beams appear as dots on
the reflector. If you cannot see the beams, hold a piece of paper in front of
the reflector.
3
Figure 5-9. Interferometer bezel with scribe line
Move the reflector back and forth or side to side until the dots are aligned
vertically between the midpoint notches in the reflector's slot
(Figure 5-10).
By doing this, you ensure that the beams strike the junction of the two
mirrors in the reflector.
Measurements Reference Guide
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5-15

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