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Chapter 11 Diagonal Measurements
Installing and Aligning the Optics on the Machine
Place the Agilent 10767-67001 alignment target (shown in Figure 11-2A),
with its hole up, over the front of the beam steering mirror. The front of
the mirror tray has recesses that enable it to hold the target.
Adjust the tripod and laser head positioning controls so the beam
autoreflects from the beam steering mirror back to the laser head's output
(upper) port, through the hole in the target.
Remove the alignment target from the beam steering mirror.
This completes the installation and initial alignment of the laser head.
Aligning the beam to the XY plane diagonal (azimuth
angle, α) of the measurement
Use this procedure to improve laser beam alignment along the XY plane
face diagonal.
In this procedure, you move a cube corner—in this case, the reference
retroreflector attached to the interferometer—along the XY plane face
diagonal and check for drifting of the return beam at the laser head.
To perform this procedure:
Move the machine to place the interferometer assembly as close to the
laser head as possible, without moving the laser head.
Do not use the mirror tilt adjustment knob on the bottom of the mirror
tray until instructed to do so.
Rotate (pitch) the beam steering mirror so beam enters the interferometer
perpendicular to its input face. The return beam from the reference
retroreflector will produce a dot on the face of the laser head near the
return (lower) port.
An alternate procedure that may be easier here is to use a rubber band to
hold a small gage block to the input face of the interferometer and use
autoreflection back through the beam steering mirror to the laser head
input port. Be sure to remove the gage block when done.
Measurements Reference Guide
11-27
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