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Chapter 9 Flatness Measurements
Aligning the Optics
3
Adjust the laser head so:
•
the return beam is centered on the target covering the laser head's
return port (you can temporarily remove the target to see the return
beam), and
•
the laser beam maintains its position in the center of the
interferometer's target.
You can adjust the laser head by tilting, turning, or translating it, or all
three.
You are now ready to align the laser beam to the optics' travel path. Go
directly to "Aligning the Laser Beam to the Optics' Travel Path."
Aligning the optics if you are using flatness mirrors
This section explains how to align the optics using either one or two
flatness mirrors.
1
Align the laser head so the beam strikes the first flatness mirror.
If you are using just one flatness mirror, align the laser head so the beam
strikes the center of that flatness mirror.
2
Move the reflector so its foot spacer touches the interferometer assembly's
base.
3
Position the flatness mirror.
•
If you are using two flatness mirrors, turn the first flatness mirror so
the laser beam is vertically in line with the flatness mirror on the
interferometer assembly. Continue with step 4.
•
If you are using just one flatness mirror, turn it so the beam is
vertically in line with the hole in the interferometer's target. Then,
skip to step 6.
4
Tilt the laser head so the beam enters the flatness mirror on the
interferometer assembly.
9-24
Measurements Reference Guide
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