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Align the device with the alignment tool
NOTICE
Damage/destruction of the alignment tool
The alignment tool can be destroyed by laser radiation.
Remove the alignment tool before turning on the laser.
For alignment of the device in the x-y plane, 2 alignment tools are included with the device.
The smaller alignment tool is held against the device, the larger one can be inserted into the slot on the device.
The alignment tools are designed for the size of the measuring window (8 x 8 mm, optionally 12 x 12 mm or
24 x 12 mm) and the resulting offset. The measuring window size of the device was specified upon ordering
and cannot be changed in the LDS.
The offset is the distance from the front edge of the horizontal carrier in park position to the center of the
measuring window in y-direction (see chapter „Offset of the measurement windows" on page 21).
1. Connect the device with the LDS as described in chapter 9.3 „Connect/disconnect the device to the
LDS" on page 29.
2. Open the Device control menu according to chapter 9.4.2 „Open „Device control" menu" on page 32.
3. Move the vertical carrier to the desired z-position according to chapter 9.4.3 „Move vertical carrier for
setup" on page 33.
4. Hold/insert the alignment tool onto the device.
The insertable alignment tool is inserted into the central slot on the horizontal carrier.
5. Turn on the pilot laser and align the device. If the pilot laser beam hits the small hole in the alignment tool,
the unit is aligned in the x-y plane.
Alignment tool
for holding onto the device
Alignment tool
for plugging into the device
Fig. 7.5:
Alignment tool of the FM+
20
Pilot beam
Alignment tool for holding onto
the device with offset indication
FocusMonitor FM+
Hole
Revision 08 EN - 08/2023
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