Hitachi U-5100 Instruction Manual page 297

(3) After start of measurement, you must wait for about 80
minutes till the end of all measurements. Upon completion
of measurement, the screen after completion of automatic
performance check (Fig. 5-30) is displayed. OK appears
when the result of each check meets the judgment standard
or NG appears if it does not meet the standard. If NG is
indicated, take a corrective measure, referring to section
5.1.1 to 5.1.6.
Performance
(Auto)
WL Accuracy (484.6 nm)
WL Repeatability
Noise Level (RMS)
Baseline Flatness
Baseline Stability
Hardware
Execute it? ：＿
□ 1 Yes □ 2 No
Fig. 5-30 Screen after Automatic Performance Check
5 - 23
CELL A
-0.2 nm OK
±0.10 nm
OK
0.0001 ABS OK
±0.000 ABS
OK
0.0002 ABS OK
OK
5.1.8