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5.1.4 Baseline Flatness
(1)
Display the screen for each item of instrument performance
check (Fig. 5-15). For display method, follow the
procedure starting from section 5.1.. Using the [▲]/[▼]
key, move the cursor to Baseline Flatness, and then select
[1] Yes. Baseline flatness will be checked. If check is not
desired actually, select [2] No.
Performance
WL Accuracy (484.6 nm)
WL Accuracy (229.0 nm)
WL Accuracy (822.8 nm)
WL Repeatability
Noise Level (RMS)
Baseline Flatness
Baseline Stability
Hardware
Print Report
Execute(Manual)? :：＿
□ 1 Yes □ 2 No
Fig. 5-15 Screen for Each Item of Instrument
Performance Check
(2)
The guidance for informing the parameter setting process
(Fig. 5-16) appears, and parameters will be set and
baseline flatness will be checked.
Setting PARAM....
Fig. 5-16 Guidance for Parameter Setting Process
(3)
After the check of baseline flatness, the screen after this
check is displayed as shown in Fig. 5-17. Measurement
result is indicated on the baseline flatness line followed by
OK when the judgment standard is met or NG if not met. If
NG is indicated, check the baseline flatness again in the
correct procedure. If NG recurs, refer to section 6.8.
5 - 13
5.1.4
CELL A
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