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5.1 Check with Instrument Main Unit Alone
5.1.5 Baseline Stability
(1)
Display the screen for each item of instrument performance
check (Fig. 5-19). For display method, follow the
procedure starting from section 5.1.. Baseline stability is
required to be measured 2 hours after power-on and under
an ambient temperature change within 5 °C. Using the
[▲]/[▼] key, move the cursor to Baseline Stability, and then
select [1] Yes. Baseline stability will be checked.
If check is not desired actually, select [2] No.
Performance
WL Accuracy (484.6 nm)
WL Accuracy (229.0 nm)
WL Accuracy (822.8 nm)
WL Repeatability
Noise Level (RMS)
Baseline Flatness
Baseline Stability
Hardware
Print Report
Execute(Manual)? :：＿
□
Yes □
1
2
Fig. 5-19 Screen for Each Item of Instrument
Performance Check
(2)
The guidance for informing the parameter setting process
(Fig. 5-20) appears, and parameters will be set and
baseline stability will be checked.
Setting PARAM....
Fig. 5-20 Guidance for Parameter Setting Process
(3)
After the check of baseline stability, the screen after this
check is displayed as shown in Fig. 5-21. Measurement
result is indicated on the baseline stability line followed by
OK when the judgment standard is met or NG if not met. If
NG is indicated, check the baseline stability again in the
correct procedure. If NG recurs, refer to section 6.8.
5 - 16
No
CELL A
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