®
Advanced Energy
INDUSTRY GUIDELINES
Table 1-5. Industry Guidelines
Standards
SEMI S2-0200
Installation Requirements
Install this unit according to the following requirements.
Operating and maintenance personnel must receive proper training
before installing, troubleshooting, or maintaining high-energy electrical
equipment. Potentially lethal voltages could cause death, serious
personal injury, or damage to the equipment. Ensure that all appropriate
safety precautions are taken.
RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all
sources of input power before working on this unit or anything
connected to it.
Conditions of Use
To comply with the stated directives and standards, you must meet the following
conditions of use:
• This device must be used in an overvoltage category II installation only.
• Before making any other connection, connect the auxiliary protective earth
ground conductor on the rear panel.
• Use only a shielded cable on the input power connector.
1-6
Safety Guidelines for Semiconductor Manufacturing
Equipment
Safety and Product Compliance Guidelines
Description
5702156-E