Optimal Output Connection Using Triax Cable - Advanced Energy Pinnacle User Manual

Pinnacle™ 20 kW
For safety compliance, do not allow the maximum voltage at the Pinnacle
unit's output connector terminals to exceed ±1500 V with respect to
ground when configuring for floating output. Take into account
allowances for ignition voltage (1500 V standard ignition) when
determining safety compliance.
Optimal Output Connection
We recommend using shielded output cable between the Pinnacle supply and your
chamber and connecting that cable in the manner described here. The shielded cable
minimizes system noise from chamber arcs and takes full advantage of the Pinnacle
unit's improved process rate.
#10 ring lug
Outer shield connected
to PE ground stud
Figure 5-5. Optimal output connection using triax cable
5702156-E
#10 ring lug
Outer shield unterminated
To chamber cathode
Installation
To chamber wall
5-13