Setup For Verifying And Calibrating The Mfcs; Verifying And Calibrating The Mfcs; Table 6-1. Examples Of Mfc Calibration Points - Teledyne T750 User Manual

Table 6-1. Examples of MFC Calibration Points

CAL DRIVE
POINT VOLTAGE
0 000 mV
1 250 mV
2 500 mV
3 750 mV
4 1000 mV
5 1250 mV
6 1500 mV
7 1750 mV
8 2000 mV
9 2250 mV
10 2500 mV
11 2750 mV
12 3000 mV
13 3250 mV
14 3500 mV
15 3750 mV
16 4000 mV
17 4250 mV
18 4500 mV
19 4750 mV
20 5000 mV
S
ETUP FOR
Note
1. Turn off the calibrator.
2. Open the calibrator's front panel for easiest access to the MFC output ports.
3. Attach the flow meter directly to the output port of the MFC to be
4. Turn ON power to the calibrator.
5. Ensure the calibrator is in Standby mode (change in Generate page if
V
ERIFYING AND
Once the external flow meter is connected to the output of the MFC being
verified/calibrated, perform the following steps (refer to Figure 6-2):
1. In the Diagnostics menu select the MFC to be tested and press the Edit
2. Check the Enable Drive box to start the flow.
104
1.0 SLPM 3.0 SLPM
MFC TARGET OUTPUT
0.000 0.000
0.050 0.150
0.100 0.300
0.150 0.450
0.200 0.600
0.250 0.750
0.300 0.900
0.350 1.050
0.400 1.200
0.450 1.350
0.500 1.500
0.550 1.650
0.600 1.800
0.650 1.950
0.700 2.100
0.750 2.250
0.800 2.400
0.850 2.550
0.900 2.700
0.950 2.850
1.000 3.000
V C
ERIFYING AND ALIBRATING THE
A separate, calibrated flow meter is required for the
procedure.
checked/tested. ( shows their locations).
needed).
C MFC
ALIBRATING THE
Table button in the Flow Table field.
MFC FULL SCALE
5.0 SLPM
0.000
0.250
0.500
0.750
1.000
1.250
1.500
1.750
2.000
2.250
2.500
2.750
3.000
3.250
3.500
3.750
4.000
4.250
4.500
4.750
5.000
MFC
S
S
10.0 SLPM
0.000
0.500
1.000
1.500
2.000
2.500
3.000
3.500
4.000
4.500
5.000
5.500
6.000
6.500
7.000
7.500
8.000
8.500
9.000
9.500
10.000
083730750B DCN8606