Calibration And Verification; Verifying And Calibrating The Mfcs; Figure 6-1. Mfc Config Page - Teledyne T750 User Manual

CALIBRATION AND VERIFICATION

Basic electronic calibration of the Calibrator is performed at the factory. Normally there is
no need to perform this factory calibration in the field however, the performance of several
of the instrument's key subsystems should be verified periodically and if necessary
adjusted. These subsystems are:
•
•
•
V
6.1.
ERIFYING AND
View the parameters for each MFC under the Utilities>Diagnostics menu.
The Flow Table for each MFC sets its output at each of 20 equally spaced control points
along its entire performance range. In the Utilities>Diagnostics menu view the Flow Table
field for each MFC by clicking the Edit Table button. For each calibration point, the
following is displayed:
•
•
This table can also be used to calibrate the output of the MFCs by adjusting either the
control voltage of a point or its associated flow output value (see Section 6.1.2).
083730750B DCN8606
Mass Flow Controllers: The accuracy of the mass flow controller outputs is
intrinsic to achieving the correct calibration mixture concentrations; therefore,
the accuracy of their output should be checked and if necessary adjusted
every 6 months (see Section 6.1).
O Photometer: The O photometer performance should be periodically
3 3
verified against an external standard (see Section 6.2).
O Generator: The O generator should be periodically calibrated (see
3 3
Section 6.3).
C MFC
ALIBRATING THE

Figure 6-1. MFC Config Page

The drive voltage in 20 equal, incremental steps from 0 mVDC to
5000 mVDC;
The expected flow rate corresponding to each drive voltage point
(each equal to1/20th of the full scale for the selected mass flow
controller).
S
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