Related Manuals for Inficon IRG080
Summary of Contents for Inficon IRG080
- Page 1 Operating Manual Incl. EU Declaration of Conformity Ion Reference Gauge IRG080 tinb74e1 (2023-01)
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Page 2: Product Identification
This passive sensor is based on an innovative concept of ioniza- tion vacuum gauge, whereby a hot cathode emits electrons travelling on a straight path into a Faraday cup. The IRG080 is operated by the Ion Reference gauge Controller IRC081. -
Page 3: Table Of Contents
Conversion Table Further Information EU Declaration of Conformity For cross-references within this document, the symbol (→ XY) is used; for cross- references to further documents listed under ‘Literature’, use is made of the symbol (→ [Z]). tinb74e1 (2023-01) IRG080.om... -
Page 4: Safety
Communicate the safety instructions to all other users. 1.4 Liability and Warranty INFICON assumes no liability and the warranty is rendered null and void if the end- user or third parties • disregard the information in this document use the product in a non-conforming manner •... -
Page 5: Technical Data
Wehnelt potential +34 V Anode potential +250 V Deflector potential 45 V Faraday cup potential +280 V Emission current range 10 … 100 µA Cathode heater current / voltage (typ.) 1.4 … 1.8 A / 2 V tinb74e1 (2023-01) IRG080.om... - Page 6 (EN 1.4404, EN 1.4435) Wehnelt cylinder stainless steel (EN 1.4404, EN 1.4435) Flange stainless steel (EN 1.4435 ESU) Internal volume, weight Internal volume ~385cm Weight 4.3 kg Dimensions [mm] DN 63 CF-R Fig. 1 Dimensions of the IRG080 tinb74e1 (2023-01) IRG080.om...
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Page 7: Installation
IRC081 controller. Do not use force to connect the plug. When plugging in make sure first that all pins are lined up in parallel and are straight. Otherwise the current feedthrough can suffer damage. tinb74e1 (2023-01) IRG080.om... -
Page 8: Dismounting The Gauge Head Connection Unit
Put the gauge out of operation first before working at the gauge cable. head connection unit After putting out of operation, wait for at least 15 seconds. For bake-out above 165 °C, the gauge head connection unit shall be disconnected. tinb74e1 (2023-01) IRG080.om... - Page 9 (3/7) on the connection sockets (3/6) Separate and remove the complete gauge head connecting unit (3/2) from the gauge head assembly (3/1). The gauge head can be baked-out up to 400 °C (200 °C with mu-metal intermediate piece 399-891). tinb74e1 (2023-01) IRG080.om...
- Page 10 Tighten the 4× slotted cylindrical head screws M3×6 (3/5) with flat head screwdriver. Recommended torque: 1 Nm. Move the cylinder housing (3/3) in. Tighten the 3× slotted truss head screws M4×6 (3/4) using a flat head screwdriver. Recommended torque: 1 Nm. tinb74e1 (2023-01) IRG080.om...
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Page 11: Operation
A1:2019/AC:2019 are fulfilled. If different controller units are used, the user is responsible for a safe operation. The IRG080 is a hot cathode ionization gauge with electrode system configuration according to ISO/WD TS 6737 (see Fig. 5, 12). Electrons emitted from the cathode are accelerated and focused with the Wehnelt cylinder into the anode space. - Page 12 Fig. 5 Lateral view and cross section representation of the IRG080 gauge head tinb74e1 (2023-01) IRG080.om...
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Page 13: Maintenance
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. tinb74e1 (2023-01) IRG080.om... -
Page 14: Cathode Replacement
Loosen the 8× hex head cap screws M8×45 (6/3) unscrewing the 8× M8 nuts (6/4) with a flat wrench 13 mm. Move carefully the DN 63 intermediate piece (6/2) upward to remove it. Pull and remove the CF gasket (6/5). tinb74e1 (2023-01) IRG080.om... - Page 15 Unscrew the 2x M3x3 hex socket set screws (8/4) on the cathode connection blocks with an Allen key 1.5 mm. Unscrew the 6x M2.5x8 vented cylindrical head socket screws (8/3) with an Allen key 2 mm. Move away the sensor unit (8/1) from the main gauge head flange (8/2). tinb74e1 (2023-01) IRG080.om...
- Page 16 CF 63 seal with a new, unused copper gasket. Before employing the gauge head, it is recommended to pump down the system and if possible run a vacuum test or a direct leak search. tinb74e1 (2023-01) IRG080.om...
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Page 17: Spare Parts, Accessories
Inappropriate storage leads to an increase of the desorption rate and/or may result in mechanical damage of the product. Cover the vacuum ports of the product with protective lids or grease free aluminum foil. Do not exceed the admissible storage temperature range (→ 5). tinb74e1 (2023-01) IRG080.om... -
Page 18: Returning The Product
8 Returning the Product WARNING Forwarding contaminated products Products returned to INFICON for service or repair should, if possible, be free of harmful substances (e.g. radioactive, toxic, caustic or microbiological). Otherwise, the type of contamination must be de- clared. Adhere to the forwarding regulations of all involved countries and for- warding companies and enclose a completed contamination declara- tion (Form under www.inficon.com). -
Page 19: Appendix
0.75 0.01 1×10 Torr 1.332 1.332×10 133.32 1.3332 0.1332 mm Hg 1 Pa = 1 N/m Further Information [1] www.inficon.com Operating Manual Ion Reference Gauge Controller IRC081 tinb82d1 (German) tinb82e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein tinb74e1 (2023-01) IRG080.om... -
Page 20: Eu Declaration Of Conformity
EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directives: 2014/35/EU, OJ L 96/357, 29.3.2014 • (Low Voltage Directive; Directive relating to electrical equipment designed for use within certain voltage limits) 2014/30/EU, OJ L 96/79, 29.3.2014... - Page 21 Notes tinb74e1 (2023-01) IRG080.om...
- Page 22 Notes tinb74e1 (2023-01) IRG080.om...
- Page 23 Notes tinb74e1 (2023-01) IRG080.om...
- Page 24 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English www.inficon.com...