Related Manuals for Inficon PCG550
Summary of Contents for Inficon PCG550
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Page 1: Information Trip Point
Communication Protocol ® EtherCAT for Pirani Capacitance Diaphragm and Pirani Standard Gauges PCG550, PCG552, PCG554, PSG550, PSG552, PSG554 tira85e1-a (2014-10) -
Page 2: General Information
Vacuum Pressure Gauge (→ [12]). We reserve the right to make technical changes without prior notice. Product Identification In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below. -
Page 3: Validity
The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to PCG550 gauges with the DN 16 ISO-KF vacuum connection. They apply to other vacuum connections and to the other gauges by analogy. -
Page 4: Patents
Patents EP 0689669 B1, 0689670 B1, 0658755 B1 US Patents 5608168, 4031997, 5583297 tira85e1-a (2014-10) PxG55x.cp... -
Page 5: Table Of Contents
Contents General Information Intended Use EtherCAT–Interface Product Identification Validity Trademark Patents Contents 1 Technical Data 2 Interface Connection 3 Operation 3.1 Introduction 3.2 Front View 3.3 Indicators and Switches 3.3.1 <RUN> LED 3.3.2 <ERR> LED 3.3.3 <LA> LED (<IN> Port) 3.3.4 <LA>... - Page 6 4.10.3 Information Piezo 4.10.4 Information Common 4.10.5 Information Heat Transfer 4.10.6 Information Trip Point 1/2 4.11 PCG without ATM, Information Area (0x9000…0x9FFF) 4.11.1 Information Capacitance Diaphragm 4.11.2 Information Common 4.11.3 Information Heat Transfer 4.11.4 Information Trip Point 1/2 4.12 PSG Information Area (0x9000…0x9FFF) 4.12.1 Information Common 4.12.2...
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Page 7: Technical Data
1 Technical Data Further technical data → [1], [2]. EtherCAT interface Communication protocol protocol specialized for EtherCAT Communication standards ETG.5003.1: Part 1 Common Device Profile (CDP) (→ [11]) ETG.5003.2080: Part 2080 Specific Device Profile (SDP): Vacuum Pressure Gauge (→... - Page 8 Dimensions [mm] x100 DN 25 ISO-KF 1/8" NPT 4 VCR 8 VCR 29.2×29.2 mm 7/16-20 UNF 24.4 4-VCR 90° tira85e1-a (2014-10) PxG55x.cp...
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Page 9: Interface Connection
2 Interface Connection Making an EtherCAT interface For operating the Pirani Standard (PSG55x) or Pirani Capacitance Diaphragm cable (PCG55x) Gauge via EtherCAT, two interface cables conforming to the EtherCAT standard are required. If no such cables are available, make two according to the following indications. Cable type Ethernet Patch Cable (CAT5e quality) with FCC68 connector. -
Page 10: Operation
3 Operation 3.1 Introduction Via the EtherCAT interface, the following and further data are exchanged in the standardized EtherCAT protocol: • Pressure reading • Pressure unit (Torr, mbar, Pa) • Zero adjustment • Status and error messages • Status of the switching functions •... -
Page 11: Indicators And Switches
3.3 Indicators and Switches 3.3.1 <RUN> LED Displays the operating status. Color LED State Description INIT (initialization status) or no power applied to device. blinking PREOP (pre-operational status). (200 ms on 200 ms off) green single flash SAFEOP (safe-operational status). (200 ms on Communication of cyclic data transfer running. -
Page 12: Device Address Switch
3.3.5 Device Address Switch During device initialization, the device address switches are read by the device firmware. This device address is supported to the master as Explicit Device x100 Identification. Example: Value of the Explicit Device ID = 0xDDD (dec 3549): 0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13) tira85e1-a (2014-10) -
Page 13: Object Structure
4 Object Structure This chapter describes the CANopen over EtherCAT (CoE) Object Dictionary. 4.1 Object Dictionary The objects in the CoE Object Dictionary can be accessed with SDO services, and many of the dictionary objects can be mapped for cyclic communication in PDOs. structure Each object is addressed using a 16-bit index and an 8-bit subindex. -
Page 14: Communication Profile Objects (0X1000
4.2 Communication Profile The objects of the communication profile describe the basic EtherCAT properties of the PxG55x and are common to all EtherCAT slaves using the CoE communication Objects protocol. The objects are described in following table: (0x1000…0x1FFF) Index DataType Access PM Name 1000... -
Page 15: Process Data Objects (Pdo's)
4.2.1 Process Data Objects • PSG gauges: They consist of one vacuum pressure sensor. (PDO's) • PCG gauges with or without ATM: They consist of two vacuum pressure sensors. The characteristic of this combi device is that only one vacuum pressure sensor outputs an actual pressure value at one time. -
Page 16: Manufacturer-Specific Profile Objects (0X2000
Sync Manager Index DataType Access PM Name 1C00 0x01 BYTE Sync Manager Type 0x02 0x03 0x04 1C12 / 0x01 UINT Sync Manager PDO 1C13 0x02 Assignment 0x03 0x04 1C32 / 0x01 Sync Manager Parameter 1C33 0x20 4.3 Manufacturer-specific The manufacturer-specific profile objects contain the manufacturer's model number and device configuration data, status and diagnostic data. -
Page 17: Manufacturer Configuration Module 3 (Pcg With Atm Only)
Subindex 0x02 Safe Value: The value to be used for Safe State = Safe Value. 4.3.3 Manufacturer • PCG gauges with ATM: The "Manufacturer Configuration Module 3" is assigned to the Pirani module. Configuration Module 3 (PCG with ATM only) Index DataType Access... -
Page 18: Input Common
Subindex 0x02 Indicates whether the Value parameter contains a value in over range. Reading Valid No Overrange Exceeded Overrange Exceeded Subindex 0x03 Indicates whether the Value parameter contains a value in under range. Reading Valid No Underrange Exceeded Underrange Exceeded Index DataType Access... -
Page 19: Input Common
Index DataType Access PM Name 4.4.5 Input Common 6020 0x0E BOOL TxPdoState 0x11 REAL Sensor Value Subindex 0x0E Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid) TxPdoState Invalid Valid Subindex 0x11 The corrected, converted, calibrated final analog input value of the sensor. -
Page 20: Input Area Pcg Without Atm (0X6000
Index DataType Access PM Name 4.4.8 Input Trip Point 2 600F 0x01 BOOL Status High Trip 0x02 BOOL Status Low Trip Subindex 0x01 Status High Trip High Trip not assert High Trip assert Subindex 0x02 Status Low Trip Low Trip not assert Low Trip assert 4.5 Input Area PCG without ATM (0x6000…0x6FFF) -
Page 21: Input Common
Index DataType Access PM Name 4.5.3 Input Common 6010 0x0E BOOL TxPdoState 0x11 REAL Sensor Value Subindex 0x0E Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid) TxPdoState Invalid Valid Subindex 0x11 The corrected, converted, calibrated final analog input value of the sensor. -
Page 22: Input Trip Point
Index DataType Access PM Name 4.5.6 Input Trip Point 2 600F 0x01 BOOL Status High Trip 0x02 BOOL Status Low Trip Subindex 0x01 Status High Trip High Trip not assert High Trip assert Subindex 0x02 Status Low Trip Low Trip not assert Low Trip assert 4.6 Input Area PSG (0x6000…0x6FFF) -
Page 23: Input Trip Point
Subindex 0x03 Indicates whether the Value parameter contains a value in under range. Reading Valid No Underrange Exceeded Underrange Exceeded Index DataType Access PM Name 4.6.3 Input Trip Point 1 600E 0x01 BOOL Status High Trip 0x02 BOOL Status Low Trip Subindex 0x01 Status High Trip High Trip not assert... -
Page 24: Configuration Capacitance Diaphragm
Index DataType Access PM Name 4.7.2 Configuration 8001 0x01 REAL Zero Adjust Mode Capacitance Diaphragm Subindex 0x01 The CDG Sensor is adjusted automatically by the Pirani sensor, if this index is set. 4.7.3 Configuration Trip The High Trip Point is calculated by: Point 1 High Trip Point = Value ×... - Page 25 Subindex 0x01 High Trip Point Disable Enable Subindex 0x02 Low Trip Point Disable Enable Subindex 0x11 High Trip Point Limit: High limit to trigger trip point condition if Input Value (I 0x900E, SI 0x01) is above this limit. Subindex 0x12 Object index of High Trip Point Value source.
- Page 26 4.7.4 Configuration Trip Calculating the High Trip Point and Low Trip Point → 4.4.7. Point 2 Index DataType Access PM Name 800F 0x01 BOOL High Trip Enable 0x02 BOOL Low Trip Enable 0x11 REAL High Trip Point Limit 0x12 UDINT High Trip Source Index 0x13 REAL...
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Page 27: Pcg Without Atm, Configuration Area (0X8000
Subindex 0x17 High Trip Hysteresis: Hysteresis value for High Trip Point. Subindex 0x18 Low Trip Hysteresis: Hysteresis value for Low Trip Point. Subindex 0x1A Object index of active source of (I 0x900F SI 0x01) Input Value. Source Index Bit 16…31 Index Bit 08…15 Subindex... - Page 28 Measurement signal (Pressure p) High Trip Hysteresis High Trip Point Low Trip Hysteresis Low Trip Point Time t active active active active active Index DataType Access PM Name 800E 0x01 BOOL High Trip Enable 0x02 BOOL Low Trip Enable 0x11 REAL High Trip Point Limit 0x12...
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Page 29: Configuration Trip Point
Subindex 0x17 High Trip Hysteresis: Hysteresis value for High Trip Point. Subindex 0x18 Low Trip Hysteresis: Hysteresis value for Low Trip Point. Subindex 0x1A Object index of active source of (I 0x900E SI 0x01) Input Value. Source Index Bit 16…31 Index Bit 08…15 Subindex... -
Page 30: Psg Configuration Area (0X8000
Subindex 0x17 High Trip Hysteresis: Hysteresis value for High Trip Point. Subindex 0x18 Low Trip Hysteresis: Hysteresis value for Low Trip Point. Subindex 0x1A Object index of active source of (I 0x900F SI 0x01) Input Value. Source Index Bit 16…31 Index Bit 08…15 Subindex... -
Page 31: Configuration Trip Point
Subindex 0x01 High Trip Point Disable Enable Subindex 0x02 Low Trip Point Disable Enable Subindex 0x11 High Trip Point Limit: High limit to trigger trip point condition if Input Value (I 0x900E, SI 0x01) is above this limit. Subindex 0x12 Object index of High Trip Point Value source. - Page 32 Subindex 0x01 High Trip Point Disable Enable Subindex 0x02 Low Trip Point Disable Enable Subindex 0x11 High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F, SI 0x01) is above this limit. Subindex 0x12 Object index of High Trip Point Value source.
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Page 33: Pcg With Atm Information Area (0X9000
4.10 PCG with ATM The Information Data object defines the input process data. Information Area (0x9000…0x9FFF) Highest / lowest Indicated measurement value pressure Error Overrange Measurement range Underrange Error Real pressure p0 p1 p2 p3 The "measurement range" is the range between minimum and maximum pressure, where the reading of the gauge is within the specified measurement uncertainty limits. -
Page 34: Information Capacitance Diaphragm
Index DataType Access PM Name 4.10.1 Information 9001 0x01 UINT Sensor Warning Capacitance Diaphragm 0x02 UINT Sensor Alarm Subindex 0x01 Sensor Warnings Bit 0 Bit 1 Electronics Warning Bit 2…15 Subindex 0x02 Sensor Alarms Bit 0 Diaphragm Failure Bit 1 Electronics Failure Bit 2…15 Index... -
Page 35: Information Heat Transfer
Subindex 0x02 Highest Informational Measurement Value: Highest value that the gauge can measure without a specified accuracy. Subindex 0x03 Highest Precision Measurement Value: Highest valid value at which the gauge is specified with an accuracy value. Above that value, the parameter Reading Valid is set to invalid. -
Page 36: Pcg Without Atm, Information Area (0X9000
4.11 PCG without ATM, The Information Data object defines the input process data. Information Area (0x9000…0x9FFF) Highest / lowest Indicated measurement value pressure Error Overrange Measurement range Underrange Error Real pressure p0 p1 p2 p3 The "measurement range" is the range between minimum and maximum pressure, where the reading of the gauge is within the specified measurement uncertainty limits. -
Page 37: Information Common
Subindex 0x01 Sensor Warnings Bit 0 Bit 1 Electronics Warning Bit 2…15 Subindex 0x02 Sensor Alarms Bit 0 Diaphragm Failure Bit 1 Electronics Failure Bit 2…15 Index DataType Access PM Name 4.11.2 Information Common 9010 0x02 REAL Highest Informational Measurement Value 0x03 REAL Highest Precision... -
Page 38: Psg Information Area (0X9000
Subindex 0x02 Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index (I 0x800F, SI 0x0E). 4.12 PSG Information Area The Information Data object defines the input process data. (0x9000…0x9FFF) Highest / lowest Indicated measurement value pressure Error Overrange... -
Page 39: Information Heat Transfer
Index DataType Access PM Name 4.12.2 Information Heat 9003 0x01 UINT Sensor Warning Transfer 0x02 UINT Sensor Alarm Subindex 0x01 Sensor Warnings Bit 0 Bit 1 Electronics Warning Bit 2…15 Subindex 0x02 Sensor Alarms Bit 0 Bit 1 Electronics Failure Bit 2…15 Index DataType... -
Page 40: Pcg Without Atm, Module Profile List
Index DataType Access PM Name 4.13.3 PCG without ATM, F010 0x01 UDINT Profile Number Module 1 Module Profile List 0x02 UDINT Profile Number Module 2 Subindex 0x01 Each sub-index lists the profile-number of the corresponding module. Subindex 0x02 Each sub-index lists the profile-number of the corresponding module. Index DataType Access... -
Page 41: Pcg Without Atm, Active Device Warning Details
Subindex 0x03 (Piezo) Active Device Warning Details(Index F381) Bit 0 Bit 1 Electronics exception Bit 2…31 Subindex 0x04 (Pirani) Active Device Warning Details(Index F381) Bit 0 Bit 1 Electronics exception Bit 2…31 Subindex 0x01 Active Manufacturer Warning Details (Index F382) Bit 0 Internal Communication Exception (between EtherCAT-Protocol and Device-Application) -
Page 42: Psg Active Device Warning Details
4.14.4 PSG Active Device The "active device warning details" parameter describes the warning state of the complete device. Warning Details Index DataType Access PM Name F381 0x01 UDINT Active Device Warning Details Device 0x02 UDINT Active Device Warning Details Module 1 F382 0x01 UDINT... -
Page 43: Pcg Without Atm, Active Device Error Details
Subindex 0x04 (Pirani) Active Device Error Details (Index F383) Bit 0 Sensor Failure Bit 1 Electronics exception Bit 2…31 Subindex 0x01 Active Manufacturer Error Details (Index F384) Bit 0 Internal Communication Exception (between EtherCAT-Protocol and Device-Application) Bit 1…31 4.14.6 PCG without ATM, The "active device error details"... -
Page 44: Psg Active Device Error Details
4.14.7 PSG Active Device The "active device error details" parameter describes the error state of the complete device. Error Details Index DataType Access PM Name F383 0x01 UDINT Active Device Error Details Device 0x02 UDINT Active Device Error Details Module 1 F384 0x01 UDINT... -
Page 45: Pcg Without Atm, Latched Device Warning Details
Index DataType Access PM Name 4.14.9 PCG without ATM, F390 USINT Latched Exceptions Status Latched Device Warning Details F391 0x01 UDINT Latched Device Warning Details Device 0x02 UDINT Latched Device Warning Details Module 1 0x03 UDINT Latched Device Warning Details Module 2 F392 0x01 UDINT... -
Page 46: Pcg Without Atm, Latched Device Error Details
Subindex 0x02 Latched Device Error Details Module 1: Latched version of 0xF383:02. Subindex 0x03 Latched Device Error Details Module 2: Latched version of 0xF383:03. Subindex 0x04 Latched Device Error Details Module 3: Latched version of 0xF383:04. Subindex 0x01 (F394) Latched Manufacturer Error Details: Latched version of 0xF384:01. Index DataType Access... -
Page 47: Pcg With Atm Device Warning Mask
Index DataType Access PM Name 4.14.14 PCG with ATM Device F3A1 0x01 UDINT Device Warning Mask Warning Mask Device 0x02 UDINT Device Warning Mask Module 1 0x03 UDINT Device Warning Mask Module 2 0x04 UDINT Device Warning Mask Module 3 F3A2 0x01 UDINT... -
Page 48: Pcg With Atm Device Error Mask
Subindex 0x02 Device Warning Mask Module 1: Mask bits for 0xF381:02 and 0xF391:02. Subindex 0x01 (F3A2) Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01. Index DataType Access PM Name 4.14.17 PCG with ATM Device F3A3 0x01 UDINT Device Error Mask Device Error Mask 0x02 UDINT... -
Page 49: Manufacturer-Device Specific Profile Objects (0Xf500
Subindex 0x02 Device Error Mask Module 1: Mask bits for 0xF383:02 and 0xF393:02. Subindex 0x01 (F3A4) Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01. 4.15 Manufacturer-device The manufacturer-specific profile objects contain the manufacturer's model number and device configuration data, status and diagnostic data. The objects are specific Profile Objects described in the following tables. -
Page 50: Gauge General
4.16 Gauge General Index DataType Access PM Name 4.16.1 Combination Gauge F640 0x01 BOOL Combination Gauge Reading Valid 0x02 BOOL Combination Gauge Overrange Exceeded 0x03 BOOL Combination Gauge Underrange Exceeded 0x11 REAL Combination Gauge Active Value 0x12 UINT Combination Gauge Active Sensor Number Subindex 0x01 Identifies whether the complete vacuum pressure gauge (with several measuring... -
Page 51: Input Latch Local Timestamp
4.17 Configure Device F840 0x01 UDINT Data Units Subindex 0x01 Unit of the Value of the Analog Input Sensor Instance and all related parameters. Trip Point Output All Instance 0x00220000 Pascal 0xFD4E0000 mbar 0x00A10000 Torr 0x00E00000 Counts (INFICON) tira85e1-a (2014-10) PxG55x.cp... -
Page 52: Information
4.18 Information Index DataType Access Name 4.18.1 PCG with ATM F940 0x01 UDINT Measurement Principle Information Device 0x02 BYTE Number of Sensors 0x04 V_STRING SW Version VPG PCB F9F0 V_STRING Manufacturer Serial Number F9F1 0x01 UDINT CDP Functional Generation Number Module 1 0x02 UDINT... -
Page 53: Pcg Without Atm, Information Device
Index DataType Access Name 4.18.2 PCG without ATM, F940 0x01 UDINT Measurement Principle Information Device 0x02 BYTE Number of Sensors 0x04 V_STRING SW Version VPG PCB F9F0 V_STRING Manufacturer Serial Number F9F1 0x01 UDINT CDP Functional Generation Number Module 1 0x02 UDINT CDP Functional... -
Page 54: Adjust And Reset
Subindex 0x01 (F940) Measurement principle assigned to the object instance. The most significant nibble of the parameter represents the sensor type of the first module, the second most significant nibble of the parameter represents the sensor type of the second Module, and so forth. Measurement Principle (Index F940) Capacitance Manometer Piezo... -
Page 55: Full Scale Adjust
Subindex 0x03 Response Byte 0 See Subindex 0x02 Byte 1 Unused Byte 2 0: Zeroing successful 1: Zeroing failed; out-of-range 2: Zeroing failed; cumulative out-of-range 3: Zeroing failed: measurement invalid 254: No previous Zero Adjust command issued 4.19.2 Full Scale Adjust Execution of this command will start a Full Scale Adjust operation. -
Page 56: Exception Reset Command
Subindex 0x01 A device reset is initiated when the following byte sequence is sent. Command Byte 0 0x74 Byte 1 0x65 Byte 2 0x73 Byte 3 0x65 Byte 4 0x72 Byte 5 0x00 = Standard reset, 0x66 = Factory Reset Subindex 0x02 Status (supported values) Reserved... -
Page 57: Store Parameters Command
4.19.5 Store Parameters Execution of this command will store all parameters to non-volatile memory. If a device automatically saves all non-volatile parameters at the time they are set, this Command command will not take any action. Index DataType Access PM Name FBF2 0x01 V_STRING(4) -
Page 58: Appendix
Appendix Literature [1] www.inficon.com Operating Manual PCG550, PCG552, PCG554 tina56d1 (German) tina56e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [2] www.inficon.com Operating Manual PSG550, PSG552, PSG554 tina60d1 (German) tina60e1 (English) INFICON AG, LI–9496 Balzers, Liechtenstein [3] ETG.1000.2: Physical Layer service definition and protocol specification ... - Page 59 Notes tira85e1-a (2014-10) PxG55x.cp...
- Page 60 LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: English tira85e1-a (2014-10) www.inficon.com t i r a85e1- a...